1. Sayensị ngwaahịa na Njirimara Ọdịdị
1.1 kristal Framework na Chemical kwụsie ike
(Aluminium nitride ceramic Substrates)
Aluminom nitride (AlN) bụ seramiiki seramiiki bandgap sara mbara nwere ihe owuwu kristal wurtzite hexagonal, nke mejupụtara akwa alumini dị arọ na-atụgharị na atom nitrogen jikọtara site na mmekọrịta covalent siri ike.
Ntọala atọm a na-adịgide adịgide na-eme ka AlN na nchekwa dị egwu, idobe ụkpụrụ ụkpụrụ ụlọ ruo 2200 Celsius C na inert ambiences na iguzogide ire ere n'okpuru ịnya igwe ọkụ siri ike.
N'adịghị ka alumina (Al abụọ O ATO), AlN enweghị kemịkalụ ka ọ gbazee nchara yana ọtụtụ gas na-anabata ya, na-eme ka ọ dị mma maka ikuku siri ike dị ka ụlọ nhazi semiconductor na okpomọkụ okpomọkụ.
Ya elu iguzogide oxidation– na-etolite naanị obere nchekwa Al ₂ O anọ oyi akwa n'elu ebe ikuku na-ekpuchi ozugbo– na-ekwe nkwa ntụkwasị obi na-adịgide adịgide na-enweghị mmebi nke nnukwu ụlọ.
Ọzọkwa, AlN na-egosi mkpuchi ọkụ eletrik na-enweghị atụ yana ihe mgbochi karịrị akarị 10 ¹⁴ Ω · cm na ike dielectric dị n'elu 30 kV/mm, dị mkpa maka ngwa voltaji dị elu.
1.2 Nrụpụta ọkụ na atụmatụ eletrọnịkị
Otu n'ime njirimara kachasị akọwapụta nke aluminom nitride bụ conductivity thermal ya dị elu, a dịgasị iche iche si 140 ka 180 W/(m · K )maka substratums-ọkwa azụmahịa– gafere 5 ugboro dị elu karịa nke alumina (≈ 30 W/(m · K)).
Nrụpụta a sitere na obere atomiki nke nitrogen na aluminom, jikọtara ya na nsogbu njikọ siri ike na oke akụkụ, nke na-enye ohere iji ụgbọ njem phonon dị mma site na latticework.
Ka o sina dị, ikuku oxygen na-emebi emebi karịsịa; chọpụtakwa ọnụọgụgụ (n'elu 100 ppm) nnọchi maka saịtị nitrogen, na-emepụta oghere aluminom dị arọ na ịgbasa phonons, si otú ahụ na-ebelata okpomọkụ conductivity nke ukwuu.
Ntụ ntụ AlN dị elu nke arụpụtara site na mbelata carbothermal ma ọ bụ nitridation kpọmkwem dị mkpa iji nweta ezigbo ọkụ ọkụ..
N'agbanyeghị ịbụ ihe mkpuchi eletrik, Ngwongwo piezoelectric na pyroelectric nke AlN na-eme ka ọ baa uru na nhụta nkeji na ngwa ebili mmiri., mgbe ya sara bandgap (~ 6.2 eV) na-akwado usoro na usoro eletrọnịkị dị elu na nke dị elu.
2. Usoro ihe owuwu na ihe isi ike mmepụta
( Aluminium nitride ceramic Substrates)
2.1 Ngwakọta ntụ ntụ na usoro ihe eji eme ihe
Imepụta substratums AlN dị elu na-amalite site na njikọ nke ultra-fine, elu-ọcha ntụ ntụ, a na-arụzukarị ya site na mmeghachi omume dịka Al ₂ O SIX + 3C + N ABỤỌ → 2AlN + 3CO (mbelata carbothermal) ma ọ bụ nitridation kwụ ọtọ nke aluminom ígwè dị arọ: 2Al + N ABỤỌ → 2AlN.
A ga-eji nlezianya mee ntụ ntụ nke na-esi na ya pụta na doped ya na enyemaka na-agba ọsọ dị ka Y ABỤỌ O Ise, CaO, ma ọ bụ oxides mbara ala na-adịghị ahụkebe iji kwalite densification na okpomọkụ dị n'etiti 1700 Celsius C na 1900 Celsius C n'okpuru ikuku nitrogen.
Ihe ndị a na-emepụta usoro mmiri mmiri dị mkpụmkpụ nke na-eme ka mgbasa nke oke ọka dịkwuo mma, na-eme ka densification zuru ezu (> 99% usoro iwu ọkpụrụkpụ) mgbe ị na-ebelata ikuku oxygen.
Mweghachi azụ na gburugburu ebe nwere carbon nwere ike belata ọdịnaya ikuku oxygen site na iwepu oxides intergranular., ya mere na-agbake elu thermal conductivity.
Inweta microstructure na-agbanwe agbanwe na oke ọka a na-achịkwa dị oke mkpa iji dozie ike arụ ọrụ, thermal arụmọrụ, na nrụpụta.
2.2 Ịmepụta Substratum na Metallization
Mgbe emechara, ceramik AlN bụ nke ziri ezi ma gbasasịa iji zute oke nnabata akụkụ achọrọ maka nkwakọ ngwaahịa eletrọnịkị., Ọtụtụ mgbe na monotony-larịị micrometer.
Site-oghere na-agwụ ike, ịcha laser, na ụkpụrụ elu na-eme ka o kwe omume ịbanye n'ime atụmatụ multilayer na sekit crossbreed.
Nzọụkwụ dị mkpa n'ichepụta mkpụrụ bụ metallization– ngwa nke conductive n'ígwé (na-emekarị tungsten, molybdenum, ma ọ bụ ọla kọpa) site na usoro dị ka oké-film obibi akwụkwọ, obere ihe nkiri sputtering, ma ọ bụ kpọmkwem bonding nke ọla kọpa (DBC).
Maka DBC, A na-ejikọta foils aluminom ọla kọpa na elu AlN na ọkwa okpomọkụ dị elu na gburugburu ebe a na-achịkwa, ịmepụta ngwa ọrụ siri ike dị mma maka ngwa dị elu ugbu a.
Usoro dị iche iche dị ka nchara brazing na-arụ ọrụ (NA) jiri titanium nwere ndị na-ere ahịa na-eme ka adhesion na nguzogide ike ọgwụgwụ ọkụ, karịsịa n'okpuru ịgba ígwè ugboro ugboro.
Nhazi ihu ihu ziri ezi na-eme ka ụfọdụ nguzogide okpomọkụ belata yana ntụkwasị obi dị elu na ngwaọrụ arụ ọrụ.
3. Uru arụmọrụ na ngwa eletrọnịkị
3.1 Nlekọta okpomọkụ na ọkụ eletrik
AlN substratums master njikwa okpomọkụ nke ngwaọrụ semiconductor dị elu dị ka IGBT mepụtara, MOSFET, na RF amplifiers eji na ụgbọ ala eletrik, inverters akụrụngwa emeghari ohuru, na usoro nke telecom.
Mwepụta okpomọkụ a pụrụ ịdabere na ya na-ezere ebe ọkụ mpaghara, na-ebelata nchekasị thermal, na ịgbatị oge ndụ ngwá ọrụ site na ibelata ihe egwu elektrọnik na delamination.
Tụnyere ihe eji eme Al ₂ O₃ nkịtị, AlN na-eme ka o kwe omume maka nha ùkwù nta na oke ike dị elu n'ihi ịdị adị ya nke ọma, na-ekwe ka ndị mmepe pịa ókèala arụmọrụ na-emebighị iguzosi ike n'ezi ihe.
N'ime ọkụ ọkụ LED na diode laser, ebe okpomọkụ nkwụsịtụ na-emetụta arụmọrụ na nkwụsi ike nke ndò, Substratums AlN na-eme ka nsonaazụ luminescent na ogologo ndụ arụ ọrụ.
Ọnụ ọgụgụ ya nke uto okpomọkụ (CTE ≈ 4.5 ppm/K) Ọzọkwa dabara na nke silicon (3.5– 4 ppm/K) na gallium nitride (GaN, ~ 5.6 ppm/K), na-ebelata esemokwu thermo-mechanical n'oge ịnya igwe ọkụ.
3.2 Ntụkwasị obi eletrik na igwe
Ọrụ okpomọkụ gara aga, AlN na-eji mfu dielectric dị ala (tan δ < 0.0005) and steady permittivity (εᵣ ≈ 8.9) throughout a broad regularity variety, making it perfect for high-frequency microwave and millimeter-wave circuits.
Ya hermetic ọdịdị na-echebe megide dampness ingress, iwepu ihe egwu emebi emebi na ntọala mmiri– uru dị mkpa karịa organic substrates.
Mechanical, AlN nwere ike mgbanwe dị elu (300– 400 MPa) na isi ike (HV ≈ 1200), ijide n'aka na ọ ga-ekwe omume n'oge njikwa, mgbakọ, na usoro nhazi.
Njirimara ndị a na-enye aka n'otu n'otu na-eme ka nguzosi ike n'ezi ihe nke sistemu dịkwuo mma, wedara ọnụego ọdịda, yana ọnụ ahịa ihe onwunwe dị ala na ngwa-dị oke mkpa.
4. Ngwa na Nkà na ụzụ Ọdịnihu
4.1 Ụlọ ọrụ mmepụta ihe, Ụgbọala, na Usoro Nchekwa
Ngwa seramiiki AlN bụ ihe a na-ahụkarị na modul ike dị elu maka draịva azụmahịa, ifufe na anyanwụ inverters, na chaja batrị nọ n'ụgbọ ala eletrik na ngwakọ.
Na aerospace na nchekwa, ha na-akwado usoro radar, ngwaọrụ agha dijitalụ, na mmekọrịta satịlaịtị, ebe arụmọrụ n'okpuru nnukwu nsogbu na-abụghị negotiable.
Ngwá ọrụ onyonyo ụlọ ọgwụ, nke mejupụtara X-ray generators na MRI usoro, nwetakwa site na nguzogide radieshon nke AlN na iguzosi ike n'ezi ihe.
Dị ka electrification fads na-agba ọsọ n'oge njem na ike ubi, Achọ maka ala AlN na-aga n'ihu na-eto eto, chụpụrụ mkpa kọmpat, oru oma, na ngwaọrụ eletrọnịkị ike a ma ama.
4.2 Nchikota na-ebilite na mmepe na-adịgide adịgide
Ihe ọhụrụ ọhụrụ ga-eme n'ọdịnihu na-elekwasị anya na ijikọ AlN ozugbo n'ime ụlọ nkwakọ ngwaahịa nwere akụkụ atọ., ihe gbanyere mkpọrọgwụ ike, na usoro nchikota dị iche iche na-ejikọta Si, SiC, na ngwa GaN.
Nnyocha n'ime ihe nkiri AlN nke nanostructured na otu kristal substratums na-achọ ịbawanye arụmọrụ ọkụ na oke agụmakwụkwọ. (> 300 W/(m · K)) maka ọgbọ na-abịa quantum na ngwa optoelectronic.
Mgbalị ibelata mmefu n'ichepụta site na nchikota ntụ ntụ, mgbakwunye mmepụta nke seramiiki dị mgbagwoju anya, na mweghachi nke scrap AlN na-enweta ume iji kwalite nkwado.
Ọzọkwa, eji eme ihe nlegharị anya site na iji nyocha ihe ngwụcha (FEA) na a na-eji ọgụgụ isi eme ihe iji kwalite nhazi mkpụrụ maka ụfọdụ ibu ọkụ na ọkụ eletrik.
Na ngwụcha, Aluminom nitride dị arọ seramiiki na-anọchite anya ihe ọhụrụ nkuku na ngwaọrụ eletrọnịkị nke oge a, na-ejikọta nke ọma na oghere dị n'etiti mkpuchi eletrik na nnyefe ọkụ pụtara ìhè.
Ọrụ ha na ikwe ka arụmọrụ dị elu, Sistemụ ike ntụkwasị obi dị elu na-emesi uru atụmatụ ha bara na mgbanwe mgbanwe nke dijitalụ na ike ọhụrụ..
5. Onye na-ebu ihe
Advanced Ceramics tọrọ ntọala na October 17, 2012, bụ ụlọ ọrụ teknụzụ dị elu kwadoro nyocha na mmepe, mmepụta, nhazi, ahịa na ọrụ aka nke seramiiki ikwu ihe na ngwaahịa. Ngwaahịa anyị gụnyere mana ọnweghị oke na ngwaahịa seramiiki Boron Carbide, Ngwaahịa seramiiki boron nitride, Ngwaahịa seramiiki Silicon Carbide, Ngwaahịa seramiiki silicon Nitride, Ngwaahịa seramiiki Zirconium Dioxide, wdg. Ọ bụrụ na ị nwere mmasị, biko nweere onwe gị ịkpọtụrụ anyị.
Tags: Aluminium nitride ceramic Substrates, aluminum nitride seramiiki, aluminom nitride
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