Film Deposition of Silicon Nitride
What is Silicon nitride?Silicon nitride is a chemical compound of the elements silicon and nitrogen. Si3N4 is the most thermodynamically stable and commercially important of the silicon nitrides, and the term "silicon nitride" commonly refers to this specific composition. It is a white, high-melting-point solid that is relatively chemically inert, attacked by dilute HF and hot H3PO4. It is very hard (8.5 on the Mohs scale). It has high thermal stability with strong optical nonlinearities for all