PECVD Silicon Nitride Coated Wafer Uses
The PECVD process involves the deposition of silicon nitride on a semiconductor wafer. This coating acts as an etch stop and a stressor to improve mobility. The hydrogen content in the coating is a major factor in determining the final residual stress. The lower the hydrogen content, the lower the stress. The plasma conditions and temperature are also important. Silicon nitride is a dielectric material used to build complex devices. Its properties make it ideal for use in electronics and micro-m