1. Bolulo ba Thepa le Botšepehi ba Sebopeho
1.1 Lintlha tse ka hare tsa Silicon Carbide
(Lithako tsa Silicon Carbide)
Silicon carbide (SiC) ke ntho e kopantsoeng ea ceramic e entsoeng ka silicon le liathomo tsa carbon tse entsoeng ka moralo oa tetrahedral latticework framework., e teng haholo ka ho fetelletseng 250 mefuta ea polytypic, ka 6H, 4H, le 3C e le e 'ngoe ea tse loketseng haholo.
Khokahano ea eona e tiileng e fana ka boima bo ikhethang (Mohs ~ 9.5), phahameng mocheso conductivity (80– 120 W/(m · K )bakeng sa likristale tse hloekileng tse ikemetseng), le inertness e tsotehang ea lik'hemik'hale, ho etsa hore e be enngwe ya disebediswa tse matla haholo bakeng sa sepakapaka se matla.
Lekhalo le leholo (2.9– 3.3 eV) e etsa bonnete ba hore mokelikeli o ikhethang oa motlakase maemong a mocheso oa kamore le ho hanyetsa tšenyo e matla ea mahlaseli, ha e ntse e fokotsehile ho fokotsa mocheso oa mocheso (~ 4.0 × 10 ⁻⁶/ K) e thusa ho hanyetsa mocheso o ikhethang oa mocheso.
Lintho tsena tsa tlhaho li bolokiloe le mochesong o fetang ho feta 1600 °C, ho lumella SiC ho boloka botšepehi ba meralo tlas'a ts'oaetso ea nako e telele ho litšepe tse qhibilihang, mosa, le likhase tse sebetsang ka matla.
Ho fapana le li-porcelain tsa oxide tse kang alumina, SiC ha e arabele habonolo ka carbon kapa mofuta oa eutectics e fokolang haholo ho fokotsa maemo a leholimo., molemo oa bohlokoa ho sebetsana le metallurgical le semiconductor.
Ha e entsoe ka li-crucibles– lijana tse entsoeng ho kenyelletsa le lisebelisoa tsa mocheso– SiC e feta lisebelisoa tsa setso tse kang quartz, graphite, le alumina ka bobeli tebello ea bophelo le ts'ebetso ea botšepehi.
1.2 Microstructure le Mechanical Security
Ts'ebetso ea li-crucibles tsa SiC e tlameletsoe ka hloko ho microstructure ea bona, e itshetlehileng hodima mokgoa wa tlhahiso le metsoako ya sintering e sebedisoang.
Li-crucibles tsa "refractory-grade crucible" hangata li hlahisoa ho sebelisoa bonding ba karabo, moo porous carbon preforms e phunyeletsoeng ka silicon e nang le metsi, ho theha β-SiC ka karabo Si(l) + C(s) → SiC(s).
Ts'ebetso ena e hlahisa sebopeho se kopaneng sa SiC ea mantlha e nang le silicon e sa lefelloeng ea litšenyehelo (5– 10%), e matlafatsang tsamaiso ea mocheso empa e ka thibela tšebeliso ho feta 1414 °C(ho qhibiliha ha silicon).
Ka lehlakoreng le leng, Li-crucible tsa SiC tse sintered ka ho felletseng li entsoe ka sintering ea boemo bo tiileng kapa ea mokelikeli ho sebelisoa li-additives tsa boron le carbon kapa alumina-yttria., ho fihlella tekano e haufi le theori le bohloeki bo boholo.
Tsena li bonts'a khanyetso e phahameng ea creep le ts'ireletso ea oxidation leha ho le joalo li bitsa chelete e ngata ebile li thata ho li etsa ka boholo bo boholo..
( Lithako tsa Silicon Carbide)
Tse ntlehali, interlacing microstructure ea sintered SiC e fana ka khanyetso e ikhethang ea ho khathala ha mocheso le ho arohana ha mechine., e bohlokoa ha u sebetsana le silicon e nang le metsi, germanium, kapa metsoako ea III-V mekhoeng ea ntlafatso ea kristale.
Moralo oa moeli oa lijo-thollo, ho kenyelletsa le taolo ea mekhahlelo ea bobeli le porosity, e bapala karolo ea bohlokoa ho theheng botsitso bo sa feleng tlas'a mocheso oa cyclic le tikoloho ea lik'hemik'hale tse mabifi.
2. Ts'ebetso ea Mocheso le Khanyetso ea Tikoloho
2.1 Thermal Conductivity le Kabo e Mofuthu
E 'ngoe ea melemo e hlalosang li-crucible tsa SiC ke hore li na le mocheso o phahameng oa mocheso, e lumellang ho fetisa mofuthu ka potlako le ka mokhoa o ts'oanang ho pholletsa le ho sebetsana le mocheso o phahameng.
Ho fapana le lihlahisoa tse tlase tsa conductivity tse kang silica e kopantsoeng (1– 2 W/(m · K)), SiC e hasanya matla a futhumatsang ka nepo leboteng la crucible, ho fokotsa libaka tse chesang tsa sebakeng sa heno le likhahla tsa mocheso.
Ho lumellana hona hoa hlokahala lits'ebetsong tse kang ho tiisa tataiso ea silicon ea multicrystalline bakeng sa photovoltaics, moo boemo ba mocheso homogeneity e otlolohileng e ama boleng bo phahameng ba kristale le botenya ba bofokoli.
Motsoako oa conductivity e phahameng le katoloso e fokotsehileng ea mocheso e baka boemo bo ikhethang ba ho sisinyeha ha mocheso. (R = k(1 - n)a/ leq), ho etsa li-crucibles tsa SiC hore li se ke tsa senyeha nakong eohle ea ho futhumala ha ntlo kapa pholileng.
Sena se lumella hore ho be le litekanyetso tse potlakileng tsa ho futhumatsa tsamaiso ea mocheso, tlhahiso e ntlafetseng, le ho fokotsa nako ea ho phomola ka lebaka la ho hlōleha ha crucible.
Ho feta moo, bokhoni ba thepa ea ho ema bakeng sa ho palama libaesekele tse futhumatsang khafetsa ntle le tšenyo e kholo e etsa hore e be e loketseng bakeng sa ts'ebetso ea licheso tsa khoebo tse tsamaeang ka holimo. 1500 °C.
2.2 Oxidation le Tšebelisano ea Lik'hemik'hale
Maemong a phahameng a mocheso moeeng, SiC e tsamaea ka oxidation e bonolo, ho etsa lera le sireletsang la amorphous silica (SiO MABELI) hodima bokahodimo ba yona: SiC + 3/2 O ₂ → SiO TWO + CO.
Lera lena le benyang le tiisa mocheso o phahameng, e sebetsa e le thibelo ea ho hasana e liehisa oxidation e eketsehileng le ho sireletsa mohaho o ka tlaase oa ceramic.
Leha ho le joalo, dibakeng tse fokotsehang kapa maemo a vacuum– e tloaelehileng ho semiconductor le ho hloekisa tšepe– oxidation e hatelloa, 'me SiC e ntse e tsoela pele ho tsitsisa lik'hemik'hale ha e bapisoa le silicon e qhibilihisitsoeng, boima bo bobebe ba aluminium, le li-slags tse 'maloa.
E hanela ho qhibiliha le ho arabela ka silicon e nang le metsi ho fihlela ho 1410 °C, le hoja ho pepeseha ha nako e telele ho ka fella ka ho nkoa ha carbon e nyenyane kapa interface e thata.
Haholo-holo, SiC ha e hlahise litšila tsa tšepe ka har'a melts e bobebe, tlhokahalo ea bohlokoa ea tlhahiso ea silicon ea boemo ba elektroniki moo ho silafatsoang ke Fe, Cu, kapa Cr e hloka ho bolokoa ka tlase ho maemo a ppb.
Leha ho le joalo, tlhokomelo e lokela ho nkoa ha ho sebetsoa litšepe tsa alkaline tsa lefatše kapa li-oxide tse arabelang haholo, kaha ba bang ba ka senya SiC maemong a mocheso a matla.
3. Mekhoa ea Tlhahiso le Taolo ea Boleng
3.1 Mekhoa ea Kaho le Taolo ea Dimensional
Tlhahiso ea li-crucibles tsa SiC e kenyelletsa ho bōpa, ho omisa, le mocheso o mongata wa sintering kapa leqhubu, ka mekhoa e khethiloeng e ipapisitseng le bohloeki bo hlokahalang, boholo, le kopo.
Mekhoa e tloaelehileng ea ho theha e kenyelletsa ho hatella isostatic, extrusion, le ho hasana ka li-slide, e 'ngoe le e 'ngoe e fana ka likhato tse fapaneng tsa ho nepahala ha li-dimensional le ho lumellana ha microstructural.
Bakeng sa li-crucibles tse kholo tse sebelisoang ho hasanya li-ingot tsa letsatsi, isostatic pressing e etsa bonnete ba hore botenya le botenya ba lebota bo tsitsitse, ho fokotsa ts'okelo ea kholo le ho hloleha hoa mocheso o sa lekaneng.
SiC e amanang le maikutlo (RBSC) li-crucibles li theko e tlaase ebile li sebelisoa hangata ho li-Foundries le limmaraka tsa letsatsi, leha ho le joalo khafetsa lithibelo silicon boholo tharollo mocheso.
Sintered SiC (SSiC) liphetolelo, ha a ntse a bitsa chelete e ngata, sebetsana le bohloeki bo tsotehang, boimana, le ho hanyetsa ho otla ha lik'hemik'hale, ho li etsa hore li tšoanelehe bakeng sa lits'ebetso tsa boleng bo holimo joalo ka GaAs kapa nts'etsopele ea kristale ea InP.
Ho sebetsa ka mokhoa o nepahetseng ka mor'a ho cheka ho ka 'na ha hlokahala bakeng sa ho finyella khanyetso e thata, haholo-holo bakeng sa crucibles e sebelisoang sebakeng se otlolohileng sa leqhoa (VGF) kapa Czochralski (CZ) litsamaiso.
Ho qeta sebaka sa bokaholimo ho bohlokoa ho fokotsa libaka tsa nucleation bakeng sa mefokolo le ho netefatsa phallo e ntle ea ho qhibiliha ha ho hasana.
3.2 Taolo ea Boleng le ho netefatsoa ka katleho
Tiisetso e tiileng ea boleng e bohlokoa ho netefatsa ho ts'epahala le bophelo bo bolelele ba li-crucible tsa SiC tlasa maemo a hlokang ts'ebetso..
Mekhoa ea tlhahlobo e sa senyeheng joalo ka tlhahlobo ea ultrasonic le X-ray tomography e sebelisoa ho bona likarolo tse ka hare., libaka, kapa diphapano tsa botenya.
Tlhahlobo ea lik'hemik'hale e sebelisang XRF kapa ICP-MS e tiisa likhato tse tlase tsa litšila tsa tšepe, ha conductivity ea mocheso le matla a feto-fetohang a ikemiselitse ho netefatsa ho lumellana ha lihlahisoa.
Hangata li-crucible li etsoa litlhahlobo tsa libaesekele tse futhumetseng pele li beleha ho fumana hore na ho ka ba le mekhoa efe e fosahetseng..
Set traceability le accreditation li tloaelehile ho semiconductor le aerospace phepelo liketane, moo ho hloleha ha karolo ho ka tlisang tahlehelo e theko e boima ya tlhahiso.
4. Likopo le Phello ea Setsebi
4.1 Semiconductor le Photovoltaic Industries
Silicon carbide crucibles e bapala karolo ea bohlokoa tlhahisong ea silicon e hloekileng haholo bakeng sa li-microelectronics le lisele tsa letsatsi..
Ka libono tsa solidification tse lebisang ho li-ingots tsa multicrystalline photovoltaic, li-crucibles tse kholo tsa SiC li sebetsa e le sejana sa mantlha sa silicon e nang le metsi, ho boloka maemo a mocheso ho feta 1500 ° C bakeng sa lipotoloho tse ngata.
Boiketlo ba tsona ba lik'hemik'hale bo emisa tšilafalo, ha ts'ireletso ea bona ea mocheso e tiisa hore ho na le mekhahlelo e tsitsitseng ea ho tiisa, e lebisang ho li-wafer tsa boleng bo holimo tse nang le liphoso tse fokolang le meeli ea lijo-thollo.
Baetsi ba bang ba koahela sebaka se ka hare ka silicon nitride kapa silika ho fokotsa bond le ho thusa ho lokolloa ha ingot ka mor'a ho pholile..
Lipatlisisong tsa kholo ea Czochralski ea li-semiconductors tse kopaneng, li-crucibles tse nyane tsa SiC li sebelisoa ho tšoara likhahla tsa GaAs, InSb, kapa CdTe, moo reactivity marginal le tshireletso dimensional bohlokoa.
4.2 Metallurgy, Feme, le Emerging Technologies
Ka holim'a li-semiconductors, Li-crucible tsa SiC li bohlokoa haholo ho hloekisoeng ha tšepe, ho lokisa motsoako, le mekhoa ea ho qhibilihisa ka tekanyo ea laboratori e kenyeletsang aluminium, koporo, le lintho tse sa tloaelehang tsa lefatše.
Ho hanyetsa ha bona ho ts'oenyeho ea mocheso le khoholeho ea mobu ho ba etsa hore ba tšoanelehe bakeng sa litsamaiso tse futhumatsang tsa induction le ho hanyetsa litsing tsa ho futhumatsa, moo ba phelang ho feta mefuta e meng ea graphite le alumina ka lipotoloho tse 'maloa.
Tlhahisong ea tlatsetso ea litšepe tse arabelang, Lits'oants'o tsa SiC li sebelisoa ka har'a vacuum cleaner induction melting ho thibela ho se sebetse hantle le tšilafalo..
Lisebelisoa tse hlahang li na le li-activator tsa letsoai tse qhibilihisitsoeng le lisebelisoa tse tsepamisitsoeng tsa matla a letsatsi, moo likepe tsa SiC li ka kenyelletsang letsoai le mocheso o phahameng kapa lisebelisoa tsa metsi bakeng sa polokelo ea matla a mocheso.
Ka tsoelo-pele e tsoelang pele ho sintering popontshwa le moralo o kwahelang, Li-crucible tsa SiC li ikemiselitse ho ts'ehetsa ts'ebetso ea thepa ea moloko o latelang, ho etsa hore ho khonehe ho hloekisa, e sebetsang hantle haholo, le litsamaiso tsa khoebo tse futhumatsang tse ka senyehang.
Ka kakaretso, silicon carbide crucibles e emela theknoloji ea bohlokoa e lumellang ho kopanya lihlahisoa tsa mocheso o phahameng, ho kopanya mocheso o tsotehang, mochine, le katleho ea lik'hemik'hale karolong e le 'ngoe e entsoeng ka boenjiniere.
Ho amoheloa ha bona ho atileng ho pholletsa le semiconductor, letsatsi, le liindasteri tsa metallurgical li totobatsa mosebetsi oa tsona e le motheo oa li-porcelain tsa khoebo tsa mehleng ena.
5. Morekisi
Advanced Ceramics e thehiloe ka Mphalane 17, 2012, ke khoebo ea theknoloji e phahameng e ikemiselitseng ho etsa lipatlisiso le nts'etsopele, tlhahiso, ho sebetsa, thekiso le lits'ebeletso tsa tekheniki tsa lisebelisoa le lihlahisoa tse amanang le ceramic. Lihlahisoa tsa rona li kenyelletsa empa ha li felle feela ho Lihlahisoa tsa Ceramic tsa Boron Carbide, Lihlahisoa tsa Ceramic tsa Boron Nitride, Silicon Carbide Lihlahisoa tsa Ceramic, Silicon Nitride Lihlahisoa tsa Ceramic, Lihlahisoa tsa Ceramic tsa Zirconium Dioxide, etc. Haeba u thahasella, ka kopo ikutloe u lokolohile ho ikopanya le rona.
Li-tag: Lithako tsa Silicon Carbide, Silicon Carbide Ceramic, Silicon Carbide Ceramic Crucibles
Lingoliloeng tsohle le litšoantšo li tsoa Marang-rang. Haeba ho na le litaba tsa copyright, ka kopo ikopanye le rona ka nako ho hlakola.
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