Magawo a Alumina Ceramic: Oyambitsa Maziko a High-Performance Electronic Packaging ndi Microsystem Integration mu Modern Technology alumina al2o3

1. Zofunikira Zakuthupi ndi Zomangamanga za Alumina Ceramics

1.1 Crystallographic ndi Compositional Maziko a α-Alumina

(Magawo a Alumina Ceramic)

Alumina ceramic substratums, zambiri zopangidwa ndi lightweight aluminium oxide (Al ₂ O ₃), imagwira ntchito ngati msana wamapaketi amakono azinthu zamagetsi chifukwa cha kufanana kwawo kwakukulu kwa kutchinjiriza kwamagetsi., kukhazikika kwamafuta, mphamvu zamakina, ndi manufacturability.

Gawo lokhazikika kwambiri la alumina pa kutentha ndi corundum, kapena α-Al Awiri O AWIRI, zomwe zimawonekera muzitsulo za hexagonal zodzaza mpweya wa okosijeni wokhala ndi ma ion aluminiyamu omwe amatenga magawo awiri mwa atatu a masamba a octahedral interstitial.

Dongosolo la atomiki lokhuthala ili limapereka kuuma kwakukulu (Mohs 9), wapamwamba kuvala kukana, ndi olimba inertness mankhwala, kupanga α-alumina kukhala yoyenera kwa malo ogwirira ntchito ovuta.

Magawo amalonda nthawi zambiri amakhala ndi 90– 99.8% Al ₂ O ZINAYI, ndi zowonjezera zazing'ono za silika (SiO TWO), maginito (MgO), kapena ma oxides achilendo omwe amagwiritsidwa ntchito ngati zithandizo zotsatsa kutsatsa kachulukidwe ndikuwongolera kukula kwambewu panthawi yotentha kwambiri.

Makhalidwe abwino kwambiri aukhondo (mwachitsanzo, 99.5% ndi kupitirira) kuwonetsa modabwitsa resistivity yamagetsi ndi matenthedwe matenthedwe, pamene m'munsi kuyera kusiyana (90– 96%) perekani mayankho otsika mtengo a mapulogalamu omwe safuna zambiri.

1.2 Microstructure ndi Defect Design for Electronic Reliability

Kuchita bwino kwa magawo a alumina m'makina a digito kumadalira kwambiri mgwirizano wa microstructural komanso kuchepetsa nkhani.

A chindapusa, equiaxed njere kapangidwe– kawirikawiri kuyambira 1 ku 10 ma micrometer– kumapangitsa kukhazikika kwa makina ndikuchepetsa kuthekera kwa kuswana kwa mng'alu pansi pa nkhawa yotentha kapena yamakina.

Porosity, makamaka olumikizana kapena pamwamba olumikizidwa pores, ziyenera kuchepetsedwa chifukwa zimawononga mphamvu zamakina komanso magwiridwe antchito a dielectric.

Njira zamakono zogwirira ntchito monga kufalitsa tepi, isostatic kukanikiza, ndi kuwongoleredwa koyendetsedwa mumlengalenga kapena malo oyendetsedwa kumathandizira kupanga magawo ang'onoang'ono okhala ndi makulidwe apafupifupi (> 99.5%) ndi pamwamba pa roughness m'munsimu 0.5 µm, Chofunika kwambiri pakupanga zitsulo zopyapyala zafilimu ndi kulumikiza chingwe.

Kuphatikiza apo, kulekanitsa zonyansa pamalire ambewu kumatha kubweretsa kuchucha kwamadzi kapena kusamuka kwa electrochemical chifukwa cha tsankho., zomwe zimafuna kuwongolera mwamphamvu pakuyera kwazinthu zopangira komanso zovuta za sintering kuti pakhale kukhulupirika kwanthawi yayitali m'malo onyowa kapena okwera kwambiri.

2. Njira Zopangira ndi Matekinoloje Omanga a Substratum

( Magawo a Alumina Ceramic)

2.1 Kufalitsa Matepi ndi Kukonza Thupi Lothandizira Eco

Kupanga kwa alumina ceramic substrates kumayamba ndi ntchito yokonzekera ya slurry yomwazika kwambiri yomwe ili ndi submicron Al ₂ O atatu ufa., organic binders, plasticizers, obalalitsa, ndi zosungunulira.

slurry iyi imakonzedwa ndi kufalikira kwa tepi– njira yopitilira pomwe kuyimitsidwa kumayikidwa pamwamba pa filimu yonyamulira yomwe ikusuntha pogwiritsa ntchito tsamba lolondola lachipatala kuti likwaniritse makulidwe ofanana., kawirikawiri pakati 0.1 mm ndi 1.0 mm.

Pambuyo zosungunulira dissipation, zotsatira “tepi yokonda zachilengedwe” imasinthasintha ndipo imatha kukhomedwa, kubowola, kapena laser-odulidwa kuti apange mipata yolumikizira yowongoka.

Zigawo zingapo zitha kupangidwa ndi laminated kuti apange ma multilayer substrates kuti azitha kutengera movutikira, ngakhale ntchito zambiri zamalonda zimagwiritsa ntchito masinthidwe osanjikiza amodzi chifukwa chakubwezeretsani m'mbuyo ndikuganizira zakukula kwamafuta..

Matepi ochezeka ndi chilengedwe amachotsedwa mosamala kwambiri kuti athetse zowonjezera za organic ndi kupasuka kokhazikika kwamafuta asanatsike komaliza..

2.2 Sintering ndi Metallization for Circuit Combination

Sintering ikuchitika mu mpweya pa kutentha pakati 1550 °C ndi 1650 °C, kumene kufalikira kwa dziko lolimba kumayendetsa kuchotsedwa kwa pore ndi kuuma kwa tirigu kuti zitheke.

The shrinkage mwachindunji pa sintering– kawirikawiri 15– 20%– ziyenera kulosera ndendende ndikupangidwira m'njira yamatepi ochezeka ndi chilengedwe kuti apange kulondola kwenikweni kwa gawo lomaliza..

Kutengera ndi sintering, metallization imayikidwa pakupanga ma conductive traces, mapepala, ndi vias.

2 njira zazikulu zimalamulira: kusindikiza filimu yokhuthala ndi kuyika filimu yopyapyala.

Mu wandiweyani-filimu zatsopano, mapepala okhala ndi ufa wachitsulo (mwachitsanzo, tungsten, molybdenum, kapena zitsulo zasiliva-palladium) amasindikizidwa pagawo laling'ono laling'ono ndipo amawotchedwa m'malo ochepetsetsa kuti akhale olimba, okonda zomatira kwambiri.

Kwa okwera kachulukidwe kapena othamanga kwambiri, Njira zamakanema ocheperako monga sputtering kapena dissipation amagwiritsidwa ntchito kutsitsa magawo olipira. (mwachitsanzo, titaniyamu kapena chromium) kutsatiridwa ndi mkuwa kapena golide, kuthandizira submicron pattern pogwiritsa ntchito photolithography.

Ma Vias ali odzaza ndi phala la conductive ndipo amawotchedwa kuti apange kulumikizana kwamagetsi pakati pa zigawo mu masitaelo amitundu yambiri..

3. Makhalidwe Ogwira Ntchito ndi Ma Metrics Kuchita Bwino mu Zida Zamagetsi

3.1 Zizolowezi za Kutentha ndi Zamagetsi Pansi Pakuvuta Kwambiri

Magawo a aluminiyamu amayamikiridwa chifukwa cha kuphatikiza kwawo kopindulitsa kwa matenthedwe apakati (20– 35 W/m · K kwa 96– 99.8% Al ₂ O ATATU), zomwe zimapangitsa kuti pakhale kutentha kodalirika kuchokera ku zida zamagetsi, ndi kuchuluka kwambiri resistivity (> 10 ¹⁴ Ω · masentimita), kuonetsetsa kuti madzi akuchulukira.

Dielectric yawo yosasintha (≈ 9– 10 ku 1 MHz) ndi otetezeka pa lonse kutentha ndi chizolowezi zosiyanasiyana, kuwapanga kukhala oyenera mayendedwe apamwamba kwambiri mpaka ma ghz ambiri, ngakhale zida zotsika-κ monga zolemetsa zopepuka za aluminium nitride zimasankhidwa kuti zigwiritsidwe ntchito ndi ma wave wave.

Coefficient ya kukula kwa kutentha (CTE) wa aluminiyamu (~ 6.8– 7.2 ppm/k) imagwirizana bwino ndi silicon (~ 3 ppm/k) ndi ma aloyi ena opaka, kuchepetsa kupsinjika kwa thermo-mechanical panthawi yogwiritsira ntchito gadget ndi kuyendetsa njinga zamoto.

Komabe, Kusagwirizana kwa CTE ndi silicon kumakhalabe vuto mu flip-chip ndi kuyika molunjika kwa die-attach, nthawi zambiri amayitanitsa ophatikiza ovomerezeka kapena zinthu zosadzaza kuti muchepetse kutopa.

3.2 Mphamvu zamakina ndi Kukhalitsa Kwachilengedwe

Mwamakani, ma alumina substratums amawonetsa mphamvu zosinthika kwambiri (300– 400 MPa) ndi kukhazikika kwabwino kwambiri pansi pa maere, kulola kugwiritsidwa ntchito kwawo muzinthu zamagetsi zamtundu wazamlengalenga, galimoto, ndi machitidwe oyendetsera malonda.

Iwo alibe kugwedezeka, mantha, ndi kukwawa pa kutentha kwakukulu, kukhalabe okhazikika pamapangidwe monga momwe 1500 ° C m'malo ozungulira.

M'mlengalenga wonyowa, high-purity alumina imawulula kunyowa pang'ono komanso kukana kwambiri kusuntha kwa ion, kupanga kukhulupirika kwa nthawi yayitali mu ntchito zakunja ndi chinyezi chambiri.

Kulimba kwa pamwamba kumatetezanso kuwonongeka kwa makina pakagwira ndi kulumikiza, ngakhale mankhwala ayenera kumwedwa kupewa m'mphepete chipping chifukwa brittleness zofunika.

4. Ntchito Zamakampani ndi Mphamvu Zaukadaulo M'magawo Onse

4.1 Zamagetsi Zamagetsi, Ma module a RF, ndi Zida Zagalimoto

Magawo a aluminiyamu ceramic amapezeka paliponse mumagetsi amagetsi, opangidwa ndi insulated chipata bipolar transistors (Zithunzi za IGBT), Zithunzi za MOSFET, ndi rectifiers, kumene amapereka kudzipatula kwa magetsi pamene akulimbikitsa kutentha kwa kutentha kwa madzi otentha.

Mu radio frequency (RF) ndi ma microwave ozungulira, amagwira ntchito ngati machitidwe operekera chithandizo kwa mabwalo ophatikizika osakanizidwa (Zithunzi za HIC), pamwamba m'dera lamayimbidwe yoweyula (SAW) zosefera, ndi ma antenna feed network chifukwa cha nyumba zawo zotetezedwa za dielectric komanso kuchepa kwakutaya.

Mu msika wamagalimoto, ma alumina substratums amagwiritsidwa ntchito pazida zowongolera injini (Zithunzi za ECU), mapulani a sensor, ndi lorry yamagetsi (EV) otembenuza mphamvu, kumene amapirira kutentha, Kutentha njinga, ndi kukhudzana mwachindunji ndi zamadzimadzi zowononga.

Kudalirika kwawo pamavuto akulu kumawapangitsa kukhala ofunikira pamakina otetezeka kwambiri monga anti-lock braking (minyewa yam'mimba) ndi njira zothandizira oyendetsa galimoto (ADAS).

4.2 Zida Zamankhwala, Zamlengalenga, ndi Arising Micro-Electro-Mechanical Solutions

Kupitilira makasitomala ndi zamagetsi zamagetsi, ma alumina substratums amagwiritsidwa ntchito pazida zachipatala zomwe zimayikidwa ngati pacemaker ndi neurostimulators., kumene kusindikiza kwa hermetic ndi biocompatibility ndikofunikira.

Muzamlengalenga ndi chitetezo, Amagwiritsidwa ntchito popanga ma avionics, machitidwe a radar, ndi ma satellite interaction modules chifukwa cha kukana kwawo kwa ma radiation ndi kukhazikika m'makonzedwe a vacuum cleaner.

Komanso, alumina imagwiritsidwa ntchito mochulukira ngati njira yodzitchinjiriza komanso yoteteza mumakina ang'onoang'ono amagetsi (MEMS), okhala ndi ma sensor a pressure, accelerometers, ndi zida za microfluidic, kumene inertness ake mankhwala ndi kugwirizana ndi kachitidwe woonda-filimu akugwira ndi opindulitsa.

Monga machitidwe a digito akadali amafunikira makulidwe amphamvu kwambiri, miniaturization, ndi umphumphu pansi pa zovuta kwambiri, alumina ceramic substratums akupitirizabe kukhala chinthu chofunika kwambiri, kulumikiza danga pakati pa kuchita bwino, ndalama, ndi kupanga muzopaka zatsopano zama digito.

5. Wopereka

Malingaliro a kampani Alumina Technology Co., Ltd., Ltd imayang'ana kwambiri pa kafukufuku ndi chitukuko, kupanga ndi kugulitsa ufa wa aluminium oxide, zinthu za aluminium oxide, aluminium oxide crucible, ndi zina., kutumikira zamagetsi, za ceramic, mankhwala ndi mafakitale ena. Kuyambira kukhazikitsidwa kwake mu 2005, kampaniyo yadzipereka kupereka makasitomala zinthu zabwino kwambiri ndi ntchito. Ngati mukuyang'ana zapamwamba aluminiyamu al2o3, chonde omasuka kulankhula nafe. ([email protected])
Tags: Magawo a Alumina Ceramic, Alumina Ceramics, aluminiyamu

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